商品規格:

GFS™ delivers a true Primary Mass Flow Standard and makes

the fundamental measurement of low gas mass flow rates practical.

• Primary gravimetric principle: measures mass and time directly.

• Covers the range of 0.2 to 200 mg/s in various gases (10 sccm to 10 slm N2).

• Extend range to higher flows with sonic nozzle based successive addition system.

• ± 0.05% of flow rate measurement uncertainty.

• Maximum outlet pressure of 650 kPa absolute.

• Controlled by GFS Tools software supporting unattended, fully automated operation